Quality factor of silicon-on-insulator Integrated Optical Ring Resonator

Integrated Optical Ring Resonator structures fabricated on SOI (silicon-on-insulator) based on MEMS (micro electronic mechanical system) present provide feasibility for highly compact and low cost integrated optical devices. The SOI Integrated Optical Micro Ring Resonator was designed and fabricated in this paper. We designed bending radius of 15 mu m optical ring resonator. Most important we designed vertical grating coupler for increasing the coupling efficiency between the single mode fiber and waveguide. We get obvious coupling of SOI Integrated Optical Micro Ring Resonator to single mode waveguide in experiments. Without any optimization processing the quality factor(Q) of micro ring resonator is demonstrated as high as 1.5 x 10(4)-1.93 x 10(4).