Quality factor of silicon-on-insulator Integrated Optical Ring Resonator

被引：2
|
作者：
Xue, Chenyang [1 ]
Jin, Yujian [1 ]
Tong, Xiaogang [1 ]
Cui, Danfeng [1 ]
Yan, Shubin [1 ]
Zhang, Wendong [2 ]
机构：
[1] North Univ China, Key Lab Instrumentat Sci & Dynam Measurement, Minist Educ, Taiyuan, Shanxi Province, Peoples R China
[2] Sci & Technol Elect, Test & Measurement Lab, Taiyuan, Peoples R China
来源：
PHOTONIC FIBER AND CRYSTAL DEVICES: ADVANCES IN MATERIALS AND INNOVATIONS IN DEVICE APPLICATIONS V | 2011年 / 8120卷
关键词：
Integrated Optical Ring Resonator; SOI; grating; quality factor;
D O I：
10.1117/12.891814
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Integrated Optical Ring Resonator structures fabricated on SOI (silicon-on-insulator) based on MEMS (micro electronic mechanical system) present provide feasibility for highly compact and low cost integrated optical devices. The SOI Integrated Optical Micro Ring Resonator was designed and fabricated in this paper. We designed bending radius of 15 mu m optical ring resonator. Most important we designed vertical grating coupler for increasing the coupling efficiency between the single mode fiber and waveguide. We get obvious coupling of SOI Integrated Optical Micro Ring Resonator to single mode waveguide in experiments. Without any optimization processing the quality factor(Q) of micro ring resonator is demonstrated as high as 1.5 x 10(4)-1.93 x 10(4).
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页数：6
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