A material removal coefficient for diamond wire sawing of silicon

被引:14
|
作者
Wallburg, Florian [1 ,2 ]
Kuna, Meinhard [2 ]
Budnitzki, Michael [2 ,3 ]
Schoenfelder, Stephan [1 ]
机构
[1] Leipzig Univ Appl Sci, Fac Engn, Karl Liebknecht Str 134, D-04277 Leipzig, Germany
[2] TU Bergakad Freiberg, Inst Mech & Fluid Dynam, Lampadius Str 4, D-09599 Freiberg, Germany
[3] Forschungszentrum Julich, Inst Adv Simulat, IAS 9 Mat Data Sci & Informat, D-52428 Julich, Germany
关键词
Diamond wire sawing; Silicon; Wear; Material removal coefficient; Simulation; ELASTIC-PLASTIC INDENTATION; PHASE-TRANSITIONS; LATERAL CRACK; DAMAGE; FRACTURE; MODEL; WEAR; CUT; GENERATION; SIMULATION;
D O I
10.1016/j.wear.2022.204400
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Diamond wire sawing (DWS) of silicon wafers has replaced loose abrasive sawing (LAS) within a very short time, mainly due to the enormous cost pressure in the photovoltaic industry. However, the LAS process is still much better investigated and understood from a mechanics point of view. This lack of micromechanically substantiated process knowledge is a major challenge in optimisation for a reliable process and the associated improvement in the quality of the products. The present work aims to contribute to this field by deriving a material removal coefficient that can be used at the process level in well-established material removal laws such as the Preston or Archard equation. The results show that the removal coefficient calculated on the basis of finite element simulations indicates a significant increase in material removal for common DWS sawing conditions in comparison to LAS, which is in good agreement with experimental findings.
引用
收藏
页数:7
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