A Resonant Differential Pressure Sensor Based on Bulk Silicon Technology

被引：0
|
作者：
Cheng, Chao [1 ,2 ]
Li, Yadong [1 ,2 ]
Lu, Yulan [1 ,2 ]
Xiang, Chao [1 ,2 ]
Chen, Jian [1 ,2 ]
Wang, Junbo [1 ,2 ]
Chen, Deyong [1 ,2 ]
机构：
[1] Chinese Acad Sci, Aerosp Informat Res Inst, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
[2] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing 100049, Peoples R China
来源：
2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2021年
基金：
国家重点研发计划;
关键词：
STRAIN-GAUGE;
D O I：
10.1109/NEMS51815.2021.9451493
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A resonant differential pressure sensor based on bulk silicon technology was put forward in this study. SOI-MEMS technology was employed to fabricate sensor die. A SOI wafer for differential pressure sensing and a GOS (glass on silicon) wafer as a cap were anodically bonded to achieve vacuum packaging for resonators. Finite element simulation was conducted, confirming that the intrinsic resonant frequencies of resonators changed with the variation of differential pressure linearly. Open-loop test results showed the resonators demonstrated a high-Q value of 22000, and differential pressure experiment results indicated that the sensitivity of sensor for differential pressure measurement was characterized as 52.75 Hz/kPa.
引用
收藏
页码：193 / 196
页数：4
相关论文
共 50 条
  • [21] A MEMS Resonant Differential Pressure Sensor With High Accuracy by Integrated Temperature Sensor and Static Pressure Sensor
    Cheng, Chao
    Yao, Jiahui
    Xue, Han
    Lu, Yulan
    Wang, Junbo
    Chen, Deyong
    Chen, Jian
    IEEE ELECTRON DEVICE LETTERS, 2022, 43 (12) : 2157 - 2160
  • [22] A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor
    Xiang, Chao
    Lu, Yulan
    Yan, Pengcheng
    Chen, Jian
    Wang, Junbo
    Chen, Deyong
    MICROMACHINES, 2020, 11 (11) : 1 - 14
  • [23] A BALANCED DUAL-DIAPHRAGM RESONANT PRESSURE SENSOR IN SILICON
    STEMME, E
    STEMME, G
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1990, 37 (03) : 648 - 653
  • [24] Optimization Design of a piezoelectric transduction Silicon resonant Pressure sensor
    Nay soe shwe
    Fan shang chun
    Guo zhan she
    MANUFACTURING ENGINEERING AND AUTOMATION I, PTS 1-3, 2011, 139-141 : 2256 - 2261
  • [25] A novel resonant pressure sensor with boron diffused silicon resonator
    Wang, Junbo
    Shi, Xiaojing
    Liu, Lei
    Wu, Zhengwei
    Chen, Deyong
    Zhao, Jinmin
    Li, Shourong
    2008 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: MEMS/NEMS TECHNOLOGY AND APPLICATIONS, 2009, 7159
  • [26] HIGH-ACCURACY PRESSURE MEASUREMENT WITH A SILICON RESONANT SENSOR
    GREENWOOD, J
    WRAY, T
    SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 : 82 - 85
  • [27] A BULK-MICROMACHINED RESONANT DIFFERENTIAL PRESSURE MICROSENSOR INSENSITIVE TO TEMPERATURE AND STATIC PRESSURE
    Cheng, Chao
    Yao, Jiahui
    Lu, Yulan
    Xiang, Chao
    Chen, Jian
    Chen, Deyong
    Wang, Junbo
    2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS), 2022, : 656 - 659
  • [28] A Micromachined Resonant Pressure Sensor with DETFs Resonator and Differential Structure
    Wang, Junbo
    Chen, Deyong
    Liu, Lei
    Wu, Zhengwei
    2009 IEEE SENSORS, VOLS 1-3, 2009, : 1321 - 1324
  • [29] Integrated differential pressure sensor in silicon-on-insulator
    Hallynck, Elewout
    Bienstman, Peter
    2012 IEEE PHOTONICS CONFERENCE (IPC), 2012, : 445 - +
  • [30] Optical sensor based on resonant porous silicon structures
    Saarinen, JJ
    Weiss, SM
    Fauchet, PM
    Sipe, JE
    OPTICS EXPRESS, 2005, 13 (10): : 3754 - 3764
12345