A high-speed thermal imaging system for semiconductor device analysis

被引：13

作者：

Hefner, A ^{[1
]}

Berning, D ^{[1
]}

Blackburn, D ^{[1
]}

Chapuy, C ^{[1
]}

Bouché, S ^{[1
]}

机构：

[1] NIST, Div Semicond Elect, Gaithersburg, MD 20899 USA

来源：

SEVENTEENTH ANNUAL IEEE SEMICONDUCTOR THERMAL MEASUREMENT AND MANAGEMENT SYMPOSIUM, PROCEEDINGS 2001 | 2001年

关键词：

D O I：

10.1109/STHERM.2001.915143

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new high-speed transient thermal imaging system is presented that provides the capability to measure the transient temperature distributions on the surface of a semiconductor chip with 1-mus time, and 15-mum spatial resolution. The system uses virtual instrument graphical user interface software that controls an infrared thermal microscope, translation stages, digitizing oscilloscope, and a device test fixture temperature controller. The computer interface consists of a front panel for viewing the temperature distribution and includes a movie play-back feature that enables viewing of the temperature distribution versus time. The computer user interface also has a sub-panel for emissivity mapping and calibration of the infrared detector. The utility of the system is demonstrated in this paper using a bipolar transistor hotspot current constriction process.

引用

页码：43 / 49

页数：7

共 50 条

[41] Statistical Analysis of High-Speed Schlieren Imaging in PAC
Cantoro, Gianmatteo
Colombo, Vittorio
Concetti, Alessia
Ghedini, Emanuele
Sanibondi, Paolo
Zinzani, Filippo
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2011, 39 (11) : 2898 - 2899
[42] A HIGH-SPEED TELEVISION SYSTEM FOR MOTION ANALYSIS
BIXBY, JA
SMPTE JOURNAL, 1983, 92 (07): : 729 - 734
[43] Loss calculation and thermal analysis of a high-speed generator
Aglén, O
IEEE IEMDC'03: IEEE INTERNATIONAL ELECTRIC MACHINES AND DRIVES CONFERENCE, VOLS 1-3, 2003, : 1117 - 1123
[44] High-Speed Power System Stability Analysis
Moroz, Volodymyr
Konoval, Volodymyr
2015 16th International Conference on Computational Problems of Electrical Engineering (CPEE), 2015, : 129 - 131
[45] Analysis on High-speed Sampling Device with Big Interior Force
Feng, Jing
Zhang, Jianli
Ma, Yongtao
MATERIALS PROCESSING TECHNOLOGY, PTS 1-4, 2011, 291-294 : 1564 - 1567
[46] A analytic model for the threshold-voltage of novel high-speed semiconductor device IMOS
Li Yu-Chen
Zhang He-Ming
Zhang Yu-Ming
Hu Hui-Yong
Xu Xiao-Bo
Qin Shan-Shan
Wang Guan-Yu
ACTA PHYSICA SINICA, 2012, 61 (04)
[47] Digital Micromirror Device Camera Used for High-Speed and High-Resolution Imaging
Feng, Wei
Zhang, Fumin
Qu, Xinghua
2016 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2016,
[48] High-temperature dual-band thermal imaging by means of high-speed CMOS camera system
Hauer, W.
Zauner, G.
IMAGE PROCESSING: MACHINE VISION APPLICATIONS VI, 2013, 8661
[49] High-speed imaging in fluids
Michel Versluis
Experiments in Fluids, 2013, 54
[50] Introduction to high-speed imaging
M. Leonardi
European Radiology, 1997, 7 : S164 - S165

← 1 2 3 4 5 →