High-performance 1.55-μm wavelength GaInAsP-InP distributed-feedback lasers with wirelike active regions

被引:90
|
作者
Nunoya, N [1 ]
Nakamura, M [1 ]
Morshed, M [1 ]
Tamura, S [1 ]
Arai, S [1 ]
机构
[1] Tokyo Inst Technol, Res Ctr Quantum Effect Elect, Tokyo 1528552, Japan
基金
日本学术振兴会;
关键词
CH4/H-2-RIE; DFB laser; EB lithography; GaInAsP-InP; OMVPE regrowth;
D O I
10.1109/2944.954137
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High-performance 1.55-mum wavelength GaInAsP-InP strongly index-coupled and gain-matched distributed-feedback (DFB) lasers with periodic wirelike active regions were fabricated by electron beam lithography, CH4/H-2-reactive ion etching, and organometallic vapor-phase epitaxial regrowth, whose index-coupling coefficient was more than 300 cm(-1). In order to design lasers for low threshold current operation, threshold current dependences on the number of quantum wells and the wire width were investigated both theoretically and experimentally. A record low threshold current density of 94 A/cm(2) among 1.55-mum DFB lasers was successfully obtained for a stripe width of 19.5 mum and a cavity length of 600 mum. Moreover, a record low threshold current of 0.7 mA was also realized at room temperature under CW condition for a 2.3-mum-wide buried heterostructure with a 200-mum-long cavity. Finally, we confirmed stable single-mode operation due to a gain-matching effect between the standing-wave profile and the wirelike active region.
引用
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页码:249 / 258
页数:10
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