InAs/GaAsSb Type-II Superlattice LWIR Focal Plane Arrays Detectors Grown on InAs Substrates

被引:5
|
作者
Huang, Min [1 ]
Chen, Jianxin [1 ]
Xu, Zhicheng [1 ]
Xu, Jiajia [1 ]
Bai, Zhizhong [1 ]
Wang, Fangfang [1 ]
Zhou, Yi [1 ]
Huang, Aibo [1 ]
Ding, Ruijun [1 ]
He, Li [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Tech Phys, Key Lab Infrared Imaging Mat & Detector, Shanghai 200083, Peoples R China
基金
中国国家自然科学基金;
关键词
Type-II superlattice; InAs/GaAsSb; photodetectors; long wavelength infrared; focal plane array;
D O I
10.1109/LPT.2020.2973204
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
InAs/GaAsSb type-II superlattice (T2SL) materials grown at a higher temperature and lattice-matched to InAs substrates are considered to have significant advantages in long wavelength infrared (LWIR) detection. In this work, an InAs/GaAsSb T2SL LWIR focal plane array (FPA) was fabricated and evaluated. The FPA has a format of 320 x 256 with a pixel pitch of 30 mu m and exhibits a 100% cutoff wavelength of 9.5 mu m at 80 K. Under a bias of -0.02V, the detectors show a dark current of 1.7 x 10(-5) A/cm(2) and a differential resistance-area of 1.5 x 10(3) Omega . cm(2). The noise equivalent temperature difference and operability of the FPA are 20.7 mK and 99.2% respectively under an integration time of 400 mu s, a 300 K background and F/2.0 optics. This high-performance FPA further verifies the feasibility of InAs/GaAsSb T2SL in LWIR detection.
引用
收藏
页码:453 / 456
页数:4
相关论文
共 50 条
  • [21] Manufacturability of type-II InAs/GaSb superlattice detectors for infrared imaging
    Hoglund, L.
    Asplund, C.
    von Wurtemberg, R. Marcks
    Kataria, H.
    Gamfeldt, A.
    Smuk, S.
    Martijn, H.
    Costard, E.
    INFRARED PHYSICS & TECHNOLOGY, 2017, 84 : 28 - 32
  • [22] Type-II InAs/GaSb superlattice detectors based on CBIRD design
    Khoshakhlagh, A.
    Ting, D. Z.
    Hoeglund, L.
    Soibel, A.
    Rafol, S. B.
    Nguyen, J.
    Keo, S. A.
    Mumolo, J.
    Liu, J.
    Gunapala, S. D.
    INFRARED SENSORS, DEVICES, AND APPLICATIONS II, 2012, 8512
  • [23] Characterization of an InAs/GaSb type-II superlattice barrier photodetector operating in the LWIR domain
    Alchaar, P.
    Rodriguez, J. B.
    Hoglund, L.
    Naureen, S.
    Christol, P.
    AIP ADVANCES, 2019, 9 (05)
  • [24] Defect density reduction in InAs/GaSb type II superlattice focal plane array infrared detectors
    Walther, Martin
    Rehm, Robert
    Schmitz, Johannes
    Niemasz, Jasmin
    Rutz, Frank
    Woerl, Andreas
    Kirste, Lutz
    Scheibner, Ralf
    Wendler, Joachim
    Ziegler, Johann
    QUANTUM SENSING AND NANOPHOTONIC DEVICES VIII, 2011, 7945
  • [25] Very long wavelength infrared focal plane arrays with 50% cutoff wavelength based on type-II InAs/GaSb superlattice
    Han, Xi
    Xiang, Wei
    Hao, Hong-Yue
    Jiang, Dong-Wei
    Sun, Yao-Yao
    Wang, Guo-Wei
    Xu, Ying-Qiang
    Niu, Zhi-Chuan
    CHINESE PHYSICS B, 2017, 26 (01)
  • [26] Investigation of ICP dry etching of InAs/GaSb type-II superlattice LWIR photodetector
    Jung, Hyun Chul
    Kang, Ko Ku
    Ryu, Seong Min
    Lee, Tae Hee
    Kim, Jong Gi
    Eom, Jun Ho
    Kim, Young Chul
    Jang, Ahreum
    Lee, Hyun Jin
    Kim, Young Ho
    Jung, Han
    Kim, Sun Ho
    Choi, Jong Hwa
    INFRARED TECHNOLOGY AND APPLICATIONS XLVII, 2021, 11741
  • [27] Fabrication of 15-μm Pitch 640 x 512 InAs/GaSb Type-II Superlattice Focal Plane Arrays
    Oguz, Fikri
    Arslan, Yetkin
    Ulker, Erkin
    Bek, Alpan
    Ozbay, Ekmel
    IEEE JOURNAL OF QUANTUM ELECTRONICS, 2019, 55 (04)
  • [28] Type II superlattice infrared detectors and focal plane arrays
    Nathan, Vaidya
    Razeghi, Manijeh
    INFRARED TECHNOLOGY AND APPLICATIONS XXXIII, 2007, 6542
  • [29] InAs-based InAs/GaAsSb type-II superlattices: Growth and characterization
    Wang, Fangfang
    Chen, Jianxin
    Xu, Zhicheng
    Zhou, Yi
    He, Li
    JOURNAL OF CRYSTAL GROWTH, 2015, 416 : 130 - 133
  • [30] Performance Analysis of InAs/Ga(In)Sb Strained Layer Superlattice Detectors and Focal Plane Arrays
    Bandara, Sumith V.
    QUANTUM SENSING AND NANOPHOTONIC DEVICES VII, 2010, 7608