Synthesis of Mica Thin Film by Pulsed Laser Deposition

被引：1

作者：

Nakasone, Yuta ^{[1
]}

Nakai, Hirokazu ^{[1
]}

Miyake, Yumiko ^{[1
]}

Yamauchi, Ryosuke ^{[1
]}

Tsuchimine, Nobuo ^{[2
]}

Kobayashi, Susumu ^{[2
]}

Sano, Yoshifumi ^{[3
]}

Takezawa, Nobutaka ^{[4
]}

Mitsuhashi, Masahiko ^{[5
]}

Kaneko, Satoru ^{[5
]}

Funakubo, Hiroshi ^{[1
]}

Yoshimoto, Mamoru ^{[1
]}

机构：

[1] Tokyo Inst Technol, Yokohama, Kanagawa 2268503, Japan

[2] TOSHIMA Mfg Co Ltd, Saitama 3550036, Japan

[3] YAMAGUCHI MICA Co Ltd, Aichi 4410106, Japan

[4] Tochigi Ind Technol Ctr, Utsunomiya, Tochigi 3213224, Japan

[5] Kanagawa Ind Technol Ctr, Ebina, Kanagawa 2430435, Japan

来源：

APPLIED PHYSICS EXPRESS | 2011年 / 4卷 / 05期

关键词：

ROOM-TEMPERATURE GROWTH; EPITAXIAL-GROWTH; SAPPHIRE; BIOTITE;

D O I：

10.1143/APEX.4.055502

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Synthesis of crystalline biotite-mica thin films was examined by applying a two-step process: (1) low-temperature growth of the mica film precursor on an ultrasmooth sapphire (alpha-Al2O3 single crystal) substrate by pulsed laser deposition using a sintered biotite ceramics target and (2) post-annealing in vacuum. X-ray diffraction and Raman scattering spectroscopy confirmed that a c-axis-oriented polycrystalline biotite-mica thin film was obtained by post-annealing the 500 degrees C-grown film precursor at temperatures above 700 degrees C in vacuum. An atomic-scale pattern corresponding to that of the cleaved natural mica surface was observed on the surface of thin film by atomic force spectroscopy. (C) 2011 The Japan Society of Applied Physics

引用

页数：3

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