Phase-type zigzag grating for suppression high order diffraction

被引：0
|
作者：
Liu, Ziwei [1 ,2 ]
Pu, Tanchao [1 ,2 ]
Shi, Lina [1 ]
Xie, Changqing [1 ]
机构：
[1] Chinese Acad Sci, Inst Microelect, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
来源：
2018 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2018年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present a novel design of phase-type diffraction grating for spectrum measurement from soft x-ray to far infrared. The 0, 2n, 3n order diffractions can be suppressed and the absolute diffraction efficiency is 27.72%.
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页数：2
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