Electrostatic actuated interference filters as optical switches for projection display applications

被引：0
|
作者：
Panitz, M [1 ]
Benecke, W [1 ]
机构：
[1] Univ Bremen, IMSAS, D-28334 Bremen, Germany
来源：
BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2003年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Optical elements for modulating light based on switchable interference filters are described. Such types of elements could be designed for use in reflection and, unlike micro mirrors, in transmission as well, which often simplifies the design of optical systems. Switching elements based on LPCVD silicon nitride membranes were developed for use in reflection. The switches show optimum performance around the wavelength they are designed for. Efficiencies (fractions of the incident light that is passing the switch) of about 70% were measured for the designwavelength. First samples for use in trans-mission have been manufactured on quartz substrates.
引用
收藏
页码：580 / 582
页数：3
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