Cost-effective, high-speed, silicon-based microring modulator integrated with grating couplers

被引:0
|
作者
Xiao, Xi [1 ]
Zhu, Yu [1 ]
Xu, Haihua [1 ]
Yu, Yude [1 ]
Yu, Jinzhong [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
关键词
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暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We demonstrate a cost-effective, 0.25 mu m-CMOS compatible, silicon-based microring modulator with monolithically integrated grating couplers. High-speed NRZ modulations of 3 Gb/s and 3-dB coupling bandwidth of similar to 60 nm are realized.
引用
收藏
页码:516 / 517
页数:2
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