AFM probe tips using heavily boron-doped silicon cantilevers - Realized in a (110) bulk silicon wafer

被引：0
|
作者：
Cho, IJ [1 ]
Park, EC [1 ]
Yoon, E [1 ]
机构：
[1] Korea Adv Inst Sci & Technol, Dept Elect Engn & Comp Sci, Taejon 305701, South Korea
来源：
MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS | 2000年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：230 / 231
页数：2
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