A new design for rotational, tunable wideband RF MEMS capacitors

被引：4
|
作者：
Pagazani, Julien [1 ,2 ]
Nicole, Pierre [1 ]
Rousseau, Lionel [2 ]
Marty, Frederic [2 ]
Lissorgues, Gaelle [2 ]
机构：
[1] THALES Airborne Syst, F-78851 Elancourt, France
[2] Univ Paris Est, ESYCOM, ESIEE Paris, Sch Engn, F-93162 Noisy Le Grand, France
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2011年 / 17卷 / 04期
关键词：
Radio Frequency; Voltage Control Oscillator; Actuation Voltage; DRIE Step; Rotational Displacement;
D O I：
10.1007/s00542-011-1226-x
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Wide range tunable components are a key point for high frequency performances. We have developed a novel RF MEMS rotational capacitor based on surface variation and high displacement. This paper will present multiple designs with physical parameter variations for comparative test with fabricated device measurements. The goal of this work is to prove the proper operation of the devices according to fulfill target performances. The main parameters will be tunability, capacitance value, resonance frequency and finally maximal actuation voltage allowed.
引用
收藏
页码：513 / 522
页数：10
相关论文
共 50 条
  • [41] RF MEMS tunable components
    Kwon, Y.
    Reid, R.
    IEEE MTT-S International Microwave Symposium Digest, 2006,
  • [42] Wideband bandpass filter design based on rf-mems technology
    Sifat S.M.
    Savaj R.
    Stiharu I.
    Kishk A.
    International Journal of Mechatronics and Applied Mechanics, 2020, 1 (07): : 70 - 74
  • [43] High reproducibility and reliability of piezoelectric MEMS tunable capacitors for reconfigurable RF front-end
    Kawakubo, T.
    Nagano, T.
    Nishigaki, M.
    Itaya, K.
    2007 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, VOLS 1 AND 2, 2007, : 435 - +
  • [44] Design and Manufacturing of Wideband Buried RF Feedthroughs for Wafer-Level RF MEMS Package
    El Gannudi, H.
    Farinelli, P.
    Pieper, I.
    Chiuppesi, E.
    Sorrentino, R.
    2010 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC), 2010, : 321 - 324
  • [45] A Novel Ultra Wideband (UWB) Filter with Double Tunable Notch-Bands Using MEMS Capacitors
    Nosrati, Mehdi
    Vahabisani, Nahid
    Daneshmand, Mojgan
    2013 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST (IMS), 2013,
  • [46] DESIGN AND SIMULATION OF A NOVEL ELECTROSTATIC TUNABLE MEMS INDUCTOR FOR RF APLLICATIONS
    Teymoori, Mir Majid
    A-Kolaei, Jaber Merrikhi
    THIRD INTERNATIONAL CONFERENCE ON COMPUTER ENGINEERING AND TECHNOLOGY (ICCET 2011), 2011, : 825 - 831
  • [47] Design and Simulation of K Band RF MEMS Tunable Combline Filter
    Deng, Zhongliang
    Cao, Xingjie
    MATERIALS RESEARCH AND APPLICATIONS, PTS 1-3, 2014, 875-877 : 2219 - 2223
  • [48] Study of intermodulation in RF MEMS variable capacitors
    Girbau, D
    Otegi, N
    Pradell, L
    Lázaro, A
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2006, 54 (03) : 1120 - 1130
  • [49] Tunable MEMS Capacitors Considering Deformation Factor
    Fang, Dong-Ming
    Zhang, Hai-Xia
    Zhao, Xiao-Lin
    2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2, 2009, : 25 - +
  • [50] Dielectric fluid immersed MEMS tunable capacitors
    McCormick, DT
    Li, ZH
    Tien, N
    2003 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2003, : 495 - 498
12345