Real-time profile of microcantilevers for sensing applications

被引:45
|
作者
Mertens, J [1 ]
Alvarez, M [1 ]
Tamayo, J [1 ]
机构
[1] CSIC, CNM, IMM, Natl Ctr Microelect,BioNanoMech Lab, Madrid 28760, Spain
关键词
D O I
10.1063/1.2136410
中图分类号
O59 [应用物理学];
学科分类号
摘要
An optical readout technique has been developed for real-time monitoring of the profile of microcantilever arrays for sensing applications. The technique is based on the automated two-dimensional scanning of a laser beam by using voice-coil actuators. Cantilever profiles are obtained with subnanometer resolution and a processing speed of about ten cantilevers per second. The technique is applied for real-time monitoring of the adsorption of the alkylthiol mercaptohexanol in an aqueous environment by using an array of five microcantilevers. Molecular adsorption produces a cantilever strain that significantly differs from the Stoney's model. Main strain changes are strongly located near the cantilever clamping. (c) 2005 Americian Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
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