Real-time profile of microcantilevers for sensing applications

被引：45

作者：

Mertens, J ^{[1
]}

Alvarez, M ^{[1
]}

Tamayo, J ^{[1
]}

机构：

[1] CSIC, CNM, IMM, Natl Ctr Microelect,BioNanoMech Lab, Madrid 28760, Spain

来源：

APPLIED PHYSICS LETTERS | 2005年 / 87卷 / 23期

关键词：

D O I：

10.1063/1.2136410

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An optical readout technique has been developed for real-time monitoring of the profile of microcantilever arrays for sensing applications. The technique is based on the automated two-dimensional scanning of a laser beam by using voice-coil actuators. Cantilever profiles are obtained with subnanometer resolution and a processing speed of about ten cantilevers per second. The technique is applied for real-time monitoring of the adsorption of the alkylthiol mercaptohexanol in an aqueous environment by using an array of five microcantilevers. Molecular adsorption produces a cantilever strain that significantly differs from the Stoney's model. Main strain changes are strongly located near the cantilever clamping. (c) 2005 Americian Institute of Physics.

引用

页码：1 / 3

页数：3

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