Heterogeneous integration in silicon photonics through micro-transfer-printing

被引：0

作者：

Zhang, Jing ^{[1
]}

Muliuk, Grigorij ^{[1
]}

Goyvaerts, Jeroen ^{[1
]}

Haq, Bahawal ^{[1
]}

Liles, Alexandros ^{[1
]}

Kumari, Sulakshna ^{[1
]}

Juvert, Joan ^{[1
]}

Op de Beeck, Camiel ^{[1
]}

Kuyken, Bart ^{[1
]}

Van Campenhout, Joris ^{[2
]}

Lepage, Guy ^{[2
]}

Verheyen, Peter ^{[2
]}

Gocalinska, Agnieszka ^{[3
]}

Pelucchi, Emanuele ^{[3
]}

Corbett, Brian ^{[3
]}

Trindade, Antonio Jose ^{[4
]}

Bower, Chris ^{[4
]}

Roelkens, Gunther ^{[1
]}

机构：

[1] Univ Ghent, IMEC, Technol Pk Zwijnaarde 126, B-9052 Ghent, Belgium

[2] IMEC, Leuven, Belgium

[3] Tyndall Natl Inst, Cork, Ireland

[4] X Celeprint Ltd, Dublin, Ireland

来源：

2019 24TH MICROOPTICS CONFERENCE (MOC) | 2019年

基金：

欧盟地平线“2020”;

关键词：

D O I：

10.23919/moc46630.2019.8982786

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Micro-transfer-printing enables the intimate integration of a wide range of opto-electronic micro-components on a silicon photonics platform. This technique allows for wafer-scale integration in a massively parallel manner with high alignment accuracy, high throughput and high yield, therefore leading to a cost reduction of complex photonic integrated circuits.

引用

页码：64 / 65

页数：2

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