Modelling analysis for design of microshutters with new electrode configuration

被引：1

作者：

Ke, Ming ^{[1
,2
]}

Kutyrev, Alexander S. ^{[1
,4
]}

Kotecki, Carl A. ^{[1
]}

Kim, Kyowon ^{[1
,5
]}

Greenhouse, Matthew A. ^{[1
]}

Chang, Meng-Ping ^{[1
]}

Fettig, Rainer ^{[1
,6
]}

Brekosky, Regis P. ^{[1
]}

Hu, Yongjie ^{[3
]}

机构：

[1] NASA, Goddard Space Flight Ctr, Greenbelt, MD 20771 USA

[2] Univ Calif Los Angeles, Mech Engn, Los Angeles, CA USA

[3] Univ Calif Los Angeles, Sch Engn & Appl Sci, Los Angeles, CA 90024 USA

[4] Univ Maryland, College Pk, MD 20742 USA

[5] Sci Syst & Applicat Inc, Lanham, MD USA

[6] Beacon Syst Inc, Coral Springs, FL USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2022年 / 343卷

关键词：

Electrostatic; Actuator; Microshutter array; Multi-object spectroscopy;

D O I：

10.1016/j.sna.2022.113661

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The Next Generation Microshutter Array (NGMSA) is an all-electrostatic actuated, programmable light transmission device used for multi-object spectroscopy. The latest NGMSA is designed to operate by applying a voltage difference between the shutter blade electrode and a single back wall electrode. We investigate the effects of different wall electrode configurations and present a bi-electrode design that allows reliable shutter actuation at a voltage difference of 70V.

引用

页数：9

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