Circuit Tracing on Integrated Circuit Using FIB Passive Voltage Contrast Effect

被引：0
|
作者：
Sorkin, Alexander [1 ]
Pawlowicz, Chris [1 ]
Krechmer, Alex [1 ]
Phaneuf, Michael W. [2 ]
机构：
[1] TechInsights, 3000 Solandt Rd, Ottawa, ON K2K 2X2, Canada
[2] FIBICS, Ottawa, ON K2E 0B9, Canada
来源：
ISTFA 2015: CONFERENCE PROCEEDINGS FROM THE 41ST INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS | 2015年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Competitive circuit analysis of Integrated Circuits (ICs) is one of the most challenging types of analysis. It involves multiple complex IC die de-processing/de-layering steps while keeping precise planarity from metal layer to metal layer. Each step is followed by Scanning Electron Microscope (SEM) imaging together with mosaicking that subsequently passes through an image recognition and Graphic Database System (GDS) conversion process. This conventional procedure is quite time and resource consuming. The current paper discusses and demonstrates a new inventive methodology of circuit tracing on an IC using known FIB Passive Voltage Contrast (PVC) effects [1]. This technique provides significant savings in time and resources.
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页码：92 / 96
页数：5
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