Design Optimization of Silicon-on-Insulator Slot-Waveguides for Electro-optical Modulators and Biosensors

被引:15
|
作者
Steglich, Patrick [1 ,2 ]
Villringer, Claus [1 ]
Pulwer, Silvio [1 ]
Casalboni, Mauro [2 ]
Schrader, Sigurd [1 ]
机构
[1] Univ Appl Sci Wildau, Fac Engn & Nat Sci, D-15745 Wildau, Germany
[2] Univ Roma Tor Vergata, Dept Ind Engn, I-00133 Rome, Italy
来源
PHOTOPTICS 2015 | 2016年 / 181卷
关键词
RING-RESONATOR; STRIP;
D O I
10.1007/978-3-319-30137-2_11
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
An approach for design optimization of the geometrical parameters of silicon-on-insulator slot-waveguides for electro-optical modulators and biosensors is presented. Theoretical investigations of field confinement factors and effective nonlinear areas for different slot-waveguide structures are critically analyzed and thoroughly calculated. With our simulation results we explain the high efficiency of electro-optical modulators and the enhanced sensitivity of biosensors compared to strip-waveguides. The influence on the effective refractive index, field confinement factor, and effective nonlinear area of the slot width and the silicon rail width were investigated.
引用
收藏
页码:173 / 187
页数:15
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