Fabrication of textured SnO2:F thin films by spray pyrolysis

被引：35
|
作者：
Ren, Yang [1 ]
Zhao, Gaoyang [1 ]
Chen, Yuanqing [1 ]
机构：
[1] Xian Univ Technol, Sch Mat Sci & Engn, Xian 710048, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2011年 / 258卷 / 02期
基金：
中国国家自然科学基金;
关键词：
Spray pyrolysis; Textured; SnO2; Film; Haze; SILICON SOLAR-CELLS; ELECTRICAL-PROPERTIES; OPTICAL-PROPERTIES; OXIDE-FILMS; DEPOSITED FLUORINE; DOPED SNO2; ZNO; SUBSTRATE; HAZE;
D O I：
10.1016/j.apsusc.2011.09.026
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Transparent conductive SnO2:F thin films with textured surfaces were fabricated on soda-lime-silica glass substrates by spray pyrolysis. Structure, morphology, optical and electrical properties of the films were investigated. Results show that the film structure, morphology, haze, transmittance and sheet resistance are dependent on the substrate temperature and film thickness. An optimal 810 nm-thick SnO2:F film with textured surface deposited at 520 degrees C exhibits polycrystalline rutile tetragonal structure with a (2 0 0) orientation. The sheet resistance, average transmittance in visible region, and haze of this film were 8 Omega/square, 80.04% and 11.07%, respectively, which are suitable for the electrode used in the hydrogenated amorphous silicon solar cells. (C) 2011 Elsevier B. V. All rights reserved.
引用
收藏
页码：914 / 918
页数：5
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