Dynamic calibration of laminar flow sensor for gases

被引：0
|
作者：
Funaki, T [1 ]
Sengoku, K [1 ]
Kawashima, K [1 ]
Kagawa, T [1 ]
机构：
[1] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa, Japan
来源：
SICE 2004 ANNUAL CONFERENCE, VOLS 1-3 | 2004年
关键词：
flow measurement; laminar flow sensor; oscillatory flow; dynamic calibration;
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
Recently, the unsteady flow rate measurement of gases is very important in various industrial fields. In this paper, we examined theoretically and experimentally the dynamic characteristics of a laminar flow sensor for gases which we developed. At first, we examined static characteristics of laminar flow sensor experimentally. We evaluated the influence of inlet region and the linear characteristic between volumetric flow rate and pressure difference. Moreover, dynamic characteristics of this laminar flow sensor have been measured experimentally using an unsteady flow generator with isothermal chamber. As a result, we confirmed the flow sensor can be measured oscillatory flow up to 50[Hz] and the laminar flow sensor has phase-lead characteristic.
引用
收藏
页码：2437 / 2442
页数：6
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