[1] Univ Freiburg, Dept Microsyst Engn IMTEK, Lab MEMS Applicat, Georges Koehler Allee 103, D-79110 Freiburg, Germany
[2] Univ Freiburg, Freiburg Mat Res Ctr FMF, Stefan Meier Str 21, D-79104 Freiburg, Germany
[3] Univ Freiburg, Inst Phys Chem, Albertstr 21, D-79104 Freiburg, Germany
[4] Carl von Ossietzky Univ Oldenburg, Inst Phys, Carl von Ossietzky Str 9-11, D-26129 Oldenburg, Germany
[5] Univ Freiburg, Freiburg Inst Adv Studies FRIAS, Albertstr 19, D-79104 Freiburg, Germany