MECHANICAL PROPERTIES OF FEW LAYER GRAPHENE CANTILEVER

被引：0

作者：

Matsui, Kazuma ^{[1
]}

Inaba, Akira ^{[1
]}

Oshidari, Yuta ^{[2
]}

Takei, Yusuke ^{[1
]}

Takahashi, Hidetoshi ^{[1
]}

Takahata, Tomoyuki ^{[1
]}

Kometani, Reo ^{[2
]}

Matsumoto, Kiyoshi ^{[1
]}

Shimoyama, Isao ^{[1
]}

机构：

[1] Univ Tokyo, Grad Sch Informat Sci & Technol, Tokyo, Japan

[2] Univ Tokyo, Dept Mech Engn, Tokyo 113, Japan

来源：

2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2014年

关键词：

CHEMICAL-VAPOR-DEPOSITION; SHEETS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.

引用

页码：1087 / 1090

页数：4

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