Maskless Patterning of Vapor-Deposited Photosensitive Film and its Application to Organic Light-Emitting Diodes

被引:3
|
作者
Muroyama, Masakazu [1 ]
Saito, Wataru [1 ]
Yokokura, Seiji [1 ]
Tanaka, Kuniaki [1 ]
Usui, Hiroaki [1 ]
机构
[1] Tokyo Univ Agr & Technol, Dept Organ & Polymer Mat Chem, Koganei, Tokyo 1848588, Japan
基金
日本科学技术振兴机构; 日本学术振兴会;
关键词
THIN-FILMS; POLYMERIZATION;
D O I
10.1143/JJAP.50.04DK07
中图分类号
O59 [应用物理学];
学科分类号
摘要
Photosensitive thin films were prepared by the codeposition of a polymerizable monomer and a photoinitiator, which were patterned by UV irradiation followed by development in an organic solvent. This technique was applied for the preparation of a phosphorescent layer of an organic light emitting diode (OLED) by combining a vinylcarbazole monomer, a dopant of a vinyl derivative of a iridium complex, and a photoinitiator of a benzophenone derivative. An OLED with multiple emitting elements was prepared by repeating this patterning process. It was confirmed that the patterning does not cause harmful damage to the device characteristics. Moreover, the device characteristics can be improved after the photo patterning because the photopolymerization stabilizes the deposited films. This method is advantageous as a new technique for patterning polymer films without using a shadow mask for vapor deposition or a photoresist. (C) 2011 The Japan Society of Applied Physics
引用
收藏
页数:5
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