Periodical micro-structuring of hydride containing metastable aluminumoxide using laser interference metallurgy

被引：12
|
作者：
Veith, M [1 ]
Andres, K
Petersen, C
Daniel, C
Holzaptel, C
Mücklich, F
机构：
[1] Leibniz Inst New Mat, D-66041 Saarbrucken, Germany
[2] Univ Saarland, Inst Inorgan Chem, D-66041 Saarbrucken, Germany
[3] Univ Saarland, Dept Mat Sci, D-66041 Saarbrucken, Germany
来源：
ADVANCED ENGINEERING MATERIALS | 2005年 / 7卷 / 1-2期
关键词：
D O I：
10.1002/adem.200400152
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The formation of μ-meter structures on a hydride containing metastable aluminumoxide (HAlO) layer using laser interference metallurgy was analyzed. It was shown that a HAlO layer produced by using the molecular precursor in a chemical vapor deposition (CVD) process can be transformed through thermal treatment into an Al/Al2O3 composite. The diffractogram measured after laser irradiation shows the presence of crystalline aluminum oxide. The patterns obtained from the two beam interference are reproduced using light microscopy and differently colored regions with a periodicity of 3.3 μm.
引用
收藏
页码：27 / 30
页数：4
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