Periodical micro-structuring of hydride containing metastable aluminumoxide using laser interference metallurgy

The formation of μ-meter structures on a hydride containing metastable aluminumoxide (HAlO) layer using laser interference metallurgy was analyzed. It was shown that a HAlO layer produced by using the molecular precursor in a chemical vapor deposition (CVD) process can be transformed through thermal treatment into an Al/Al2O3 composite. The diffractogram measured after laser irradiation shows the presence of crystalline aluminum oxide. The patterns obtained from the two beam interference are reproduced using light microscopy and differently colored regions with a periodicity of 3.3 μm.