Structure, Properties and Applications of Diamond Like Nanocomposite (SiOx Containing DLC) Films: A Review

被引：62
|
作者：
Meskinis, Sarunas [1 ]
Tamuleviciene, Asta [1 ]
机构：
[1] Kaunas Univ Technol, Inst Mat Sci, LT-50131 Kaunas, Lithuania
来源：
MATERIALS SCIENCE-MEDZIAGOTYRA | 2011年 / 17卷 / 04期
关键词：
SiOx containing diamond like carbon; diamond like nanocomposite films; C-H FILMS; BEAM DEPOSITED SIOX; CARBON-FILMS; TRIBOLOGICAL PROPERTIES; NANOMECHANICAL PROPERTIES; DIELECTRIC-PROPERTIES; THERMAL-CONDUCTIVITY; RAMAN-SPECTROSCOPY; OPTICAL-PROPERTIES; COATINGS;
D O I：
10.5755/j01.ms.17.4.770
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The present article reviews current situation on SiOx containing diamond like carbon (diamond like nanocomposite) films. The overview of different deposition methods and reagents used is presented; chemical composition of different diamond like nanocomposite films is described. Different models of structure of diamond like nanocomposite films are considered. Mechanical, optical, electrical properties as well as surface energy of diamond like nanocomposite films produced by different methods are reviewed and discussed. The survey of different potential and industrial applications of diamond like nanocomposite films is presented.
引用
收藏
页码：358 / 370
页数：13
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