Interaction of magnetized electrons with a boundary sheath: investigation of a specular reflection model

被引:6
|
作者
Krueger, Dennis [1 ]
Brinkmann, Ralf Peter [1 ]
机构
[1] Ruhr Univ Bochum, Ctr Plasma Sci & Technol, Inst Theoret Elect Engn, D-44780 Bochum, Germany
来源
PLASMA SOURCES SCIENCE & TECHNOLOGY | 2017年 / 26卷 / 11期
关键词
modeling of magnetized technological plasmas; magnetron; HiPIMS;
D O I
10.1088/1361-6595/aa9248
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
This publication reports analytical and numerical results concerning the interaction of gyrating electrons with a plasma boundary sheath, with focus on partially magnetized technological plasmas. It is assumed that the electron Debye length lambda(D) is much smaller than the electron gyroradius r(L), and r(L) in turn much smaller than the mean free path. and the gradient length L of the fields. Focusing on the scale of the gyroradius, the sheath is assumed as infinitesimally thin (lambda(D) -> 0), collisions are neglected (lambda -> infinity), the magnetic field is taken as homogeneous, andelectric fields (= potential gradients) in the bulk are neglected (L -> infinity). The interaction of anelectron with the electric field of the plasma boundary sheath is represented by a specular reflection v -> v - 2v . e(z)e(z) of the velocity v at the plane z = 0 of. a naturally oriented Cartesianco ordinate system (x, y, z). The electron trajectory is then given as sequences of helical sections, with the kinetic energy epsilon and the canonical momenta p(x) and p(y) conserved, but not the position of the axis (base point R-0), the. slope (pitch angle chi), and the phase (gyrophase phi). A 'virtual interaction' which directly maps the incoming electrons to the outgoing ones is introduced and studied in dependence of the angle gamma between the field and the sheath normal e(z). The corresponding scattering operator is constructed, mathematically characterized, and given as an infinite matrix. An equivalent boundary condition for a transformed kinetic model is derived.
引用
收藏
页数:12
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