Rapid prototyping of glass microfluidic chips

被引:1
|
作者
Kotz, Frederik [1 ]
Plewa, Klaus [1 ]
Bauer, Werner [1 ]
Hanemann, Thomas [1 ]
Waldbaur, Ansgar [1 ]
Wilhelm, Elisabeth [1 ]
Neumann, Christiane [1 ]
Rapp, Bastian E. [1 ]
机构
[1] Karlsruhe Inst Technol, D-76344 Eggenstein Leopoldshafen, Germany
关键词
Glass microfluidics; rapid prototyping; silica nanodispersion; microfabrication; microstructured glass; SOFT LITHOGRAPHY; DISPERSIONS; SILICA;
D O I
10.1117/12.2076964
中图分类号
R318 [生物医学工程];
学科分类号
0831 ;
摘要
In academia the rapid and flexible creation of microfluidic chips is of great importance for microfluidic research. Besides polymers glass is a very important material especially when high chemical and temperature resistance are required. However, glass structuring is a very hazardous process which is not accessible to most members of the microfluidic community. We therefore sought a new method for the rapid and simple creation of transparent microfluidic glass chips by structuring and sintering amorphous silica suspensions. The whole process from a digital mask layout to a microstructured glass sheet can be done within two days. In this paper we show the applicability of this process to fabricate capillary driven microfluidic systems.
引用
收藏
页数:6
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