共 50 条
- [31] Characteristic Analysis and Simulation for Polysilicon comb micro-accelerometer SEVENTH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION AND CONTROL TECHNOLOGY: SENSORS AND INSTRUMENTS, COMPUTER SIMULATION, AND ARTIFICIAL INTELLIGENCE, 2008, 7127
- [32] A new silicon biaxial decoupled resonant micro-accelerometer Microsystem Technologies, 2015, 21 : 109 - 115
- [33] Closed-loop system of a capacitive micro-accelerometer Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology, 2010, 42 (11): : 1720 - 1723
- [34] High precision fiber DFB laser micro-accelerometer MATERIAL SCIENCE AND ADVANCED TECHNOLOGIES IN MANUFACTURING, 2014, 852 : 296 - +
- [35] Modeling and improvement of a low-frequency micro-accelerometer REVIEW OF SCIENTIFIC INSTRUMENTS, 2021, 92 (02):
- [37] Stress-induced warpage and the compensation in a composite micro-accelerometer MICROMACHINED DEVICES AND COMPONENTS II, 1996, 2882 : 147 - 151
- [39] Design and simulations of a new biaxial silicon resonant micro-accelerometer MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2016, 22 (12): : 2829 - 2834
- [40] The key technologies of SOI micro-accelerometer front release process MICRO-NANO TECHNOLOGY XIV, PTS 1-4, 2013, 562-565 : 192 - 197