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High-resolution transmission electron microscopy study on the solid-phase crystallization of amorphous SrBi2Ta2O9 thin films on Si
被引:4
|作者:
Choi, JH
Lee, JY
Kim, YT
机构:
[1] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Yosong Ku, Taejon 305701, South Korea
[2] Korea Inst Sci & Technol, Semicond Mat Lab, Seoul, South Korea
关键词:
nucleation;
planar defects;
oxides;
perovskites;
ferroelectric materials;
D O I:
10.1016/S0022-0248(00)01000-9
中图分类号:
O7 [晶体学];
学科分类号:
0702 ;
070205 ;
0703 ;
080501 ;
摘要:
During the solid-phase crystallization of amorphous SrBi2Ta2O9 (SBT) thin films, the grains grew preferentially to the [1 1 0] direction forming elliptical grains. The origin of the [1 1 0]-oriented grain growth is due to the highest ionic packing (0 0 1) SET plane which includes TaO6 octahedra, and the nearest bonding direction of TaO6 octahedra in SBT plane is the [1 1 0] direction. High-resolution transmission electron microscopy acid image computer simulation indicate that antiphase boundary enhances elliptical grain growth between the amorphous matrix and the crystalline SET grain. The formation of a stacking fault results in an antiphase boundary making an atomic step of {0 0 1} planes at the amorphous/crystalline interface. At that interface, a corner of the antiphase boundary acts as preferable nucleation sites by providing an atomic step of {0 0 1} planes and enhances elliptical grain growth in the [1 1 0] direction on {0 0 1} planes. (C) 2001 Elsevier Science B.V. All rights reserved.
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页码:161 / 168
页数:8
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