A Portable, Benchtop Photolithography System Based on a Solid-State Light Source

被引：38
|
作者：
Huntington, Mark D. [1 ]
Odom, Teri W. [1 ,2 ]
机构：
[1] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[2] Northwestern Univ, Dept Chem, Evanston, IL 60208 USA
来源：
SMALL | 2011年 / 7卷 / 22期
基金：
美国国家科学基金会;
关键词：
photolithography; microfabrication; nanofabrication; microfluidics; soft lithography; SOFT LITHOGRAPHY; ARRAYS; MICROFLUIDICS; FABRICATION;
D O I：
10.1002/smll.201101209
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
A portable and compact photolithography system based on a solid-state light source of UV light-emitting diodes (LEDs) is described. Solid-state photolithography can achieve high-quality patterns over a wide range of length scales at a fraction of the cost of contact mask aligners. 2D nanoscale and 1D microscale patterns can easily be created. © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
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页码：3144 / 3147
页数：4
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