Post-fabrication phase trimming of Mach-Zehnder interferometers by laser annealing of germanium implanted waveguides

被引：30

作者：

Chen, Xia ^{[1
]}

Milosevic, Milan M. ^{[1
]}

Thomson, David J. ^{[1
]}

Khokhar, Ali Z. ^{[1
]}

Franz, Yohann ^{[1
]}

Runge, Antoine F. J. ^{[1
]}

Mailis, Sakellaris ^{[1
]}

Peacock, Anna C. ^{[1
]}

Reed, Graham T. ^{[1
]}

机构：

[1] Univ Southampton, Optoelect Res Ctr, Southampton SO17 1BJ, Hants, England

来源：

PHOTONICS RESEARCH | 2017年 / 5卷 / 06期

基金：

英国工程与自然科学研究理事会;

关键词：

SILICON-ON-INSULATOR; RESONATORS; MODULATOR; DRIVER;

D O I：

10.1364/PRJ.5.000578

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a novel high-accuracy post-fabrication trimming technique to fine-tune the phase of integrated Mach-Zehnder interferometers, enabling permanent correction of typical fabrication-based phase errors. The effective index change of the optical mode is 0.19 in our measurement, which is approximately an order of magnitude improvement compared to previous work with similar excess optical loss. Our measurement results suggest that a phase accuracy of 0.078 rad was achievable with active feedback control. Published by Chinese Laser Press under the terms of the Creative Commons Attribution 4.0 License.

引用

页码：578 / 582

页数：5

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