PtSi Schottky-barrier infrared focal plane arrays

PtSi Schottky-barrier (SB) FPAs have been developed for ground-based thermal imaging and spaceborne remote sensing applications, making the best possible use of its process compatibility with Si LSIs. The FPAs for mid wavelength infrared (MWIR: 3 - 5 mu m) thermal imaging are large format 2-D arrays with several array sizes up to 1040x1040. An original readout architecture called the Charge Sweep Device (CSD) has contributed to enhancing their sensitivities, and our state-of-the-art technology has reached a level which realizes FPAs with NETDs of the order of 30 mK. Extending the SE FPA technology to the short wavelength infrared (SWIR: 1 - 3 mu m) spectral region has made it possible to exploit spaceborne remote sensing applications. The space-grade performance and reliability have been demonstrated with a 4096 element and 2100 element linear FPAs.