A physically based model for dielectric charging in an integrated optical MEMS wavelength selective switch

被引：1
|
作者：
Nielson, GN [1 ]
Barbastathis, G [1 ]
机构：
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
来源：
IEEE/LEOS OPTICAL MEMS 2005: INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND THEIR APPLICATIONS | 2005年
关键词：
D O I：
10.1109/OMEMS.2005.1540081
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A physical parameter based model for dielectric charge accumulation is proposed and used to predict the displacement versus applied voltage and pull-in response of an electrostatic MEMS wavelength selective integrated optical switch.
引用
收藏
页码：69 / 70
页数：2
相关论文
共 50 条
  • [21] Edge Wavelength Selective Switch for Optical Access Networks
    Chansky, Evan D.
    Arrunategui-Norvick, Viviana
    Hirokawa, Takako
    Campos, L. Alberto
    Zhang, Haipeng
    Xu, Mu
    Jia, Zhensheng
    Schow, Clint L.
    2022 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC), 2022,
  • [22] InP monolithically integrated wavelength selector based on periodic optical filter and optical switch chain
    Calabretta, Nicola
    Stabile, Ripalta
    Albores-Mejia, Aaron
    Williams, Kevin A.
    Dorren, Harm J. S.
    OPTICS EXPRESS, 2011, 19 (26): : 531 - 536
  • [23] InP Monolithically Integrated Wavelength Selector based on Periodic Optical Filter and Optical Switch Chain
    Calabretta, N.
    Stabile, R.
    Albores-Mejia, A.
    Williams, K. A.
    Dorren, H. J. S.
    2011 37TH EUROPEAN CONFERENCE AND EXHIBITION ON OPTICAL COMMUNICATIONS (ECOC 2011), 2011,
  • [24] Physically based predictive model of oxide charging
    Conley, JF
    Lenahan, L
    Wallace, BD
    1996 INTERNATIONAL INTEGRATED RELIABILITY WORKSHOP FINAL REPORT, 1996, : 134 - 141
  • [25] Dynamic Wavelength Allocation in Integrated Optical Path and Optical Packet Switch
    Bui, Dang-Quang
    Harai, Hiroaki
    Hwang, Won-Joo
    IEICE TRANSACTIONS ON COMMUNICATIONS, 2011, E94B (12) : 3412 - 3420
  • [26] Multi-Band Photonic Integrated Wavelength Selective Switch
    Kraemer, Rafael
    Nakamura, Fumi
    van den Hout, Menno
    van der Heide, Sjoerd
    Okonkwo, Chigo
    Tsuda, Hiroyuki
    Napoli, Antonio
    Calabretta, Nicola
    JOURNAL OF LIGHTWAVE TECHNOLOGY, 2021, 39 (19) : 6023 - 6032
  • [27] Theoretical and Simulated Investigation of Dielectric Charging Effect on a Capacitive RF-MEMS Switch
    Ya, Ma Li
    Soin, Norhayati
    Nordin, Anis Nurashikin
    2016 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS (ICSE) PROCEEDINGS, 2016, : 17 - 20
  • [28] A Compact Model For Dielectric Charging in RF MEMS Capacitive Switches
    Sumant, Prasad S.
    Aluru, Narayana R.
    Cangellaris, Andreas C.
    INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, 2009, 19 (02) : 197 - 203
  • [29] Highly Integrated MEMS Optical Switch: Multibody Coupling Mechanism
    Dai, Jun
    Cao, Jun
    Zhao, Yizhuang
    Zhang, Hao
    Lian, Zheng
    Xie, Jin
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2025, 74
  • [30] A Novel RF-MEMS Shunt Capacitive Switch Design for Dielectric Charging Mitigation
    Liu, Yuhao
    Bi, Songjie
    Bey, Yusha
    Liu, Xiaoguang
    2015 IEEE MTT-S INTERNATIONAL MICROWAVE WORKSHOP SERIES ON ADVANCED MATERIALS AND PROCESSES FOR RF AND THZ APPLICATIONS (IMWS-AMP), 2015, : 174 - 176
12345