A physically based model for dielectric charging in an integrated optical MEMS wavelength selective switch

被引：1
|
作者：
Nielson, GN [1 ]
Barbastathis, G [1 ]
机构：
[1] Sandia Natl Labs, Albuquerque, NM 87185 USA
来源：
IEEE/LEOS OPTICAL MEMS 2005: INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND THEIR APPLICATIONS | 2005年
关键词：
D O I：
10.1109/OMEMS.2005.1540081
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A physical parameter based model for dielectric charge accumulation is proposed and used to predict the displacement versus applied voltage and pull-in response of an electrostatic MEMS wavelength selective integrated optical switch.
引用
收藏
页码：69 / 70
页数：2
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