Chemical sensors based on funstionalized microcantilever arrays

Over the past three decades there have been spectacular developments in micro-electro-mechanical (MEMS) systems. As a result, an innovative family of chemical and biological sensors has emerged. While MEMS represents a diverse family of designs, devices with simple cantilever configurations are especially attractive as transducers for chemical and biological sensors. In this work we discuss chemical sensors based on cantilever arrays functionalized with synthetic responsive phases. In order to analyze multiplexed responses of the cantilever array, we used an artificial neural network (ANN) algorithm. This approach allowed us not only to recognize the individual analytes and binary mixtures, but also to determine the concentration of individual components in a mixture.