Electrical investigation of V-defects in GaN using Kelvin probe and conductive atomic force microscopy

被引:30
|
作者
Lochthofen, A. [1 ]
Mertin, W. [1 ]
Bacher, G. [1 ]
Hoeppel, L. [2 ]
Bader, S. [2 ]
Off, J. [2 ]
Hahn, B. [2 ]
机构
[1] Univ Duisburg Essen, Werkstoffe Elektrotech & CeNIDE, D-47057 Duisburg, Germany
[2] OSRAM Opto Semicond, D-93055 Regensburg, Germany
关键词
D O I
10.1063/1.2953081
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the electrical characterization of V-defects in GaN-based heterostructures via Kelvin probe force microscopy (KPFM) and conductive atomic force microscopy (C-AFM). The KPFM measurements show for n- and p-doped GaN top layers an increase in the work function within the V-defects. Surprisingly, an increase in the current flow within the V-defects is found by C-AFM in case of the n-doped structure, while current flow into the V-defect is suppressed for the p-doped structure. For a consistent explanation of these results we suggest a model, which is based on an increase in the electron affinity of the {10-11}-surfaces within the V-defects as compared to the planar (0001)-surface. (C) 2008 American Institute of Physics.
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页数:3
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