Multi-port RF MEMS waveguide switch

被引：2

作者：

Daneshmand, M ^{[1
]}

Mansour, RR ^{[1
]}

机构：

[1] Univ Waterloo, Waterloo, ON N2L 3G1, Canada

来源：

2005 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM, VOLS 1-4 | 2005年

关键词：

microelectromechanical device; waveguide switch; MEMS switch; MEMS waveguide switch;

D O I：

10.1109/MWSYM.2005.1516777

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, for the first time, a novel multi port C-type RF MEMS waveguide switch is investigated. The switch is well suited to high power redundancy switch matrices for satellite communication and can be easily extended to millimeter wave applications. The switch is a 4-port waveguide device that incorporates four sets of MEMS actuators and possesses two different operating states. The use of unique bi-layer curled electrostatic actuators, results in a very good RF performance with an isolation of 36:40 dB and a return loss of -20dI3 over a 1GHz bandwidth at satellite Ku band.

引用

页码：935 / 938

页数：4

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