Quantitative STEM: Experimental Methods and Applications

被引：3

作者：

LeBeau, J. M. ^{[1
]}

Findlay, S. D. ^{[2
]}

Allen, L. J. ^{[3
]}

Stemmer, S. ^{[4
]}

机构：

[1] North Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27606 USA

[2] Monash Univ, Sch Phys, Clayton, Vic 3800, Australia

[3] Univ Melbourne, Sch Phys, Melbourne, Vic 3010, Australia

[4] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA

来源：

ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2011 (EMAG 2011) | 2012年 / 371卷

关键词：

DIFFRACTION;

D O I：

10.1088/1742-6596/371/1/012053

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

High-angle annular dark-field (HAADF) imaging in scanning transmission electron microscopy (STEM) is highly sensitive to both the atomic number and the Debye-Waller factor of the atom columns. We will discuss the experimental requirements for a quantitative understanding of STEM image contrast, in particular the determination of the precise specimen thickness. We show that near perfect agreement can be achieved between theory and experiment and demonstrate that quantitative STEM allows for column-by-column counting of all the atoms in an arbitrarily shaped specimen.

引用

页数：5

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