Development of an ultra-precision positioner and its applications

被引：0
|
作者：
Egashira, Y
Kosaka, K
Takada, S
Iwabuchi, T
Shibata, M
Nagamoto, K
Kubota, H
机构：
[1] Kumamoto Univ, Grad Sch Sci & Technol, Kumamoto 8608555, Japan
[2] Tokyo Technol Inc, Hachioji, Tokyo 1920914, Japan
[3] Kumamoto Technol Inc, Kumamoto 8620918, Japan
[4] Kumamoto Univ, Dept Elect & Comp Engn, Kumamoto 8608555, Japan
来源：
BEAM INJECTION ASSESSMENT OF MICROSTRUCTURES IN SEMICONDUCTORS, 2000 | 2000年 / 78-79卷
关键词：
piezoelectric device; positioner; ultra-precision stage; ultrasonic motor;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Along with the alternation of LSIs generation, many ultra-precision technologies should be developed for the sub-0.1 mum resolution positioner. Not only are the optical sources for the nano-scale patterning, but also the stage totally controlled by the ultra-precision positioner is significant. This study reports the application of the ultra-precision positioner to a high velocity stage for the sub-0.1 mum range, which conventional positioners couldn't attain.
引用
收藏
页码：413 / 417
页数：5
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