Overview of surfactant applications in semiconductor manufacturing.

被引：0

作者：

Hurd, T ^{[1
]}

Solomentsev, Y ^{[1
]}

Siddiqui, S ^{[1
]}

Matz, P ^{[1
]}

Riley, D ^{[1
]}

Hall, L ^{[1
]}

Misra, A ^{[1
]}

Fisher, M ^{[1
]}

机构：

[1] Texas Instruments Inc, Dallas, TX 75243 USA

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2003年 / 226卷

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

316-COLL

引用

页码：U398 / U399

页数：2

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