Sequential X-ray Diffraction Topography at 1-BM X-ray Optics Testing Beamline at the Advanced Photon Source

被引：21

作者：

Stoupin, Stanislav ^{[1
]}

Shvyd'ko, Yuri ^{[1
]}

Trakhtenberg, Emil ^{[1
]}

Liu, Zunping ^{[1
]}

Lang, Keenan ^{[1
]}

Huang, Xianrong ^{[1
]}

Wieczorek, Michael ^{[1
]}

Kasman, Elina ^{[1
]}

Hammonds, John ^{[1
]}

Macrander, Albert ^{[1
]}

Assoufid, Lahsen ^{[1
]}

机构：

[1] Argonne Natl Lab, Adv Photon Source, Argonne, IL 60439 USA

来源：

PROCEEDINGS OF THE 12TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION (SRI2015) | 2016年 / 1741卷

关键词：

RESOLUTION;

D O I：

10.1063/1.4952940

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We report progress on implementation and commissioning of sequential X-ray diffraction topography at 1-BM Optics Testing Beamline of the Advanced Photon Source to accommodate growing needs of strain characterization in diffractive crystal optics and other semiconductor single crystals. The setup enables evaluation of strain in single crystals in the nearly-nondispersive double-crystal geometry. Si asymmetric collimator crystals of different crystallographic orientations were designed, fabricated and characterized using in-house capabilities. Imaging the exit beam using digital area detectors permits rapid sequential acquisition of X-ray topographs at different angular positions on the rocking curve of a crystal under investigation. Results on sensitivity and spatial resolution are reported based on experiments with high-quality Si and diamond crystals. The new setup complements laboratory-based X-ray topography capabilities of the Optics group at the Advanced Photon Source.

引用

页数：5

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