YBa2Cu3O7-x /SrTiO3//LaAlO3 heterostructures obtained by injection MOCVD

被引：6
|
作者：
Lindner, J [1 ]
Weiss, F
Senateur, JP
Abrutis, A
机构：
[1] INPG, LMPG, CNRS, UMR 5628, St Martin Dheres, France
[2] Vilnius State Univ, DGIC, LT-2006 Vilnius, Lithuania
[3] Aixtron AG, Aachen, Germany
来源：
INTEGRATED FERROELECTRICS | 2000年 / 30卷 / 1-4期
关键词：
injection MOCVD; films; BaxSr1-xTiO3; oxide superconductors; X-ray; electrical properties;
D O I：
10.1080/10584580008222279
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
YBa2Cu3O7-x /BaxSr1-xTiO3/LaAlO3 heterostructures can be used as a basis for devices with voltage control in microwave circuits. BaxSr1-xTiO3 (x=0-0.1)(BST) thin films have been epitaxially grown on LaAlO3 substrates using injection MOCVD. The excellent crystalline quality of the obtained BST films can be proven by a FWHM of <0,2<degrees> for the rocking curve of the (002) BST reflection. An AFM study revealed flat surfaces, showing a surface roughness R-s as low as 1nm. YBa2Cu3O7-x/BaxSr1-x TiO3/LaAlO3 heterostructures were than optimised. The YBa2Cu3O7-x (YBCO) layers obtained on BaSr1-xTiO3 Alms are epitaxial with a FWHM of 0.45 degrees for the (005) YBCO rocking curve and display very promising superconducting proper ties of T-c=92K. Finally the microwave properties of the superconducting films were studied. For YBa2Cu3O7-x layers directly deposited on LaAlO3. surface resistance values of 0,32m Omega were obtained, while for YBa2Cu3O7-x/SrTiO3/LaAlO3 heterostructures, higher values of 1m Omega at 8.5GHz were measured.
引用
收藏
页码：301 / 308
页数：8
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