A HIGH-PERFORMANCE, TEMPERATURE-STABLE, CONTINOUSLY TUNED MEMS CAPACITOR

被引：0
|
作者：
Shim, Yonghyun [1 ]
Wu, Zhengzheng [1 ]
Rais-Zadeh, Mina [1 ]
机构：
[1] Univ Michigan, Ann Arbor, MI 48109 USA
来源：
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2011年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports on a continuously tunable MEMS capacitor with a wide tuning range of 5:1, high quality factor of better than 100 (at 1 GHz) at each tuned state, and self-resonance frequency of more than 13.5 GHz. The temperature stability of the capacitance in the temperature range of -50 degrees C to 60 degrees C is better than 7%, which is one of the best reported for continuously tuned capacitors. The maximum tuning speed of the capacitor is measured to be better than 40 mu sec.
引用
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页码：752 / 755
页数：4
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