Determination of technological process modes for surface formation of substrates for functional components of microoptoelectromechanical systems

被引：0
|
作者：
Nevliudov, I. Sh [1 ]
Chala, O. O. [1 ]
Botsman, I., V [1 ]
机构：
[1] Kharkiv Natl Univ Radio Elect, 14 Nauky Ave, UA-61166 Kharkiv, Ukraine
来源：
FUNCTIONAL MATERIALS | 2021年 / 28卷 / 02期
关键词：
functional component; micro-optoelectromechanical systems; technological process; roughness; substrates;
D O I：
10.15407/fm28.02.381
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A method of determining the technological modes for the process of substrates surfaces shaping for the functional components of micro-optoelectromechanical systems is proposed, which allows us to improve the quality of the substrates. A mathematical model is developed to describe the influence degree of the technological process parameters on the roughness during the shaping substrate functional surfaces for the components of micro-optoelectromechanical systems. It allows predicting the parameters of finished optoelectronic products based on these components. The experimental research results for obtaining the dependence of substrate surface quality for micromirrors of optical switches on the processing modes during the grinding and polishing technological operations are presented.
引用
收藏
页码：381 / 385
页数：5
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