Micromachined catalytic combustible hydrogen gas sensor

被引：116

作者：

Lee, Eui-Bok ^{[1
]}

Hwang, In-Sung ^{[2
]}

Cha, Jung-Ho ^{[3
]}

Lee, Ho-Jun ^{[3
]}

Lee, Won-Bae ^{[3
]}

Pak, James Jungho ^{[4
]}

Lee, Jong-Heun ^{[2
]}

Ju, Byeong-Kwon ^{[1
]}

机构：

[1] Korea Univ, Coll Engn, Sch Elect Engn, Display & Nanosyst Lab, Seoul 136713, South Korea

[2] Korea Univ, Dept Mat Sci & Engn, Seoul 136713, South Korea

[3] Seju Engn, Taejon 305801, South Korea

[4] Korea Univ, Coll Engn, Microelect & Micro Nano Syst Lab, Seoul 136713, South Korea

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2011年 / 153卷 / 02期

关键词：

Catalytic combustion; MEMS; Hydrogen gas sensor; PELLISTOR ARRAY; FILMS;

D O I：

10.1016/j.snb.2010.11.004

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

An integrated catalytic combustion H-2 sensor has been fabricated by using MEMS technology. Both the sensing elements and the reference elements could be integrated into the suspended micro heaters connected in a suitable circuit such as a Wheatstone configuration with low power consumption. Two sensitive elements and two reference sensors were integrated together onto a single chip. The size of chip was 5.76 mm(2) and the catalytic combustion sensor showed high response to H-2 at operating voltage of 1 V. The response and recovery times to 1000 ppm H-2 were 0.36 s and 1.29 s, respectively. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：392 / 397

页数：6

共 50 条

[31] Thermal and gas-sensing properties of a micromachined thermal conductivity sensor for the detection of hydrogen in automotive applications
Simon, I
Arndt, M
SENSORS AND ACTUATORS A-PHYSICAL, 2002, 97-8 : 104 - 108
[32] A Micromachined Gas Flow Sensor With Polydimethylsiloxane Flow Channels
Sun, Jianhai
Cui, Dafu
Zhang, Lulu
Chen, Xing
Li, Hui
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2013, 22 (03) : 723 - 729
[33] Domestic gas sensor with micromachined optical tunable filter
Grasdepot, F
Alause, H
Knap, W
Malzac, JP
Suski, J
SENSORS AND ACTUATORS B-CHEMICAL, 1996, 36 (1-3) : 377 - 380
[34] A low-power micromachined MOSFET gas sensor
Briand, D
van der Schoot, B
de Rooij, NF
Sundgren, H
Lundström, I
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2000, 9 (03) : 303 - 308
[35] A micromachined gas inertial sensor based on thermal expansion
Zhu, Rong
Cai, Songlin
Ding, Henggao
Yang, Yong Jun
Su, Yan
SENSORS AND ACTUATORS A-PHYSICAL, 2014, 212 : 173 - 180
[36] Modelling of Thermal Processes in Catalytic Gas Microsensors Implementing a Measurement of Combustible Gas Concentration
Kozlov, A. G.
2016 17TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME), 2016,
[37] Combustible gas production during catalytic pyrolysis of municipal solid waste
Yang, Di
Xie, Qiang
Shu, Xinqian
Jia, Yiman
Jia, Jinwei
Fu, Xingmin
Xu, Ziqi
Lu, Mingyuan
Xu, Guohuan
Li, Zijun
ENERGY SOURCES PART A-RECOVERY UTILIZATION AND ENVIRONMENTAL EFFECTS, 2017, 39 (03) : 277 - 283
[38] Micromachined thermoelectric hydrogen sensor of double-membrane structure
Tajima, K
Choi, Y
Shin, W
Izu, N
Matsubara, I
Murayama, N
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2005, 44 (12-15): : L367 - L370
[39] Development of an energy-harvesting toxic and combustible gas sensor for oil and gas industries
Aliyu, Farouq
Sheltami, Tarek
SENSORS AND ACTUATORS B-CHEMICAL, 2016, 231 : 265 - 275
[40] Research on nonlinear calibration of mine catalytic-combustion-based combustible-gas sensor based on RBF neural network
Wang, Bowen
HELIYON, 2023, 9 (03)

← 1 2 3 4 5 →