Characterization of group II hafnates and zirconates for metal-insulator-metal capacitors

被引：17

作者：

Lupina, Grzegorz ^{[1
]}

Seifarth, Olaf ^{[1
]}

Dudek, Piotr ^{[1
]}

Kozlowski, Grzegorz ^{[1
]}

Dabrowski, Jarek ^{[1
]}

Thieme, Hans-Juergen ^{[1
]}

Lippert, Gunther ^{[1
]}

Schroeder, Thomas ^{[1
]}

Muessig, Hans-Joachim ^{[1
]}

机构：

[1] IHP, D-15236 Frankfurt, Oder, Germany

来源：

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS | 2011年 / 248卷 / 02期

关键词：

dielectric thin films; high-k capacitors; X-ray absorption spectroscopy; HIGH-K DIELECTRICS; PEROVSKITE SOLID-SOLUTIONS; ELECTRONIC-STRUCTURE; SI(111); DEVICES; OXIDES;

D O I：

10.1002/pssb.201046456

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Thin layers of SrHfO(3), BaHfO(3) and BaZrO(3) are deposited onto TiN-substrates and investigated in view of memory capacitor applications. The as deposited layers are amorphous and show dielectric constants of about 20 Rapid thermal annealing induces crystallization in the cubic perovskite phase and results in an increase of the dielectric constant up to 45. A combination of X-ray absorption spectroscopy (XAS) and photoemission spectroscopy measurements reports high electronic band gap values comparable with that of reference HfO(2) layers.

引用

页码：323 / 326

页数：4

共 50 条

[41] Physical and electrical characterization of HfO2 metal-insulator-metal capacitors for Si analog circuit applications
Hu, H
Zhu, CX
Lu, YF
Wu, YH
Liew, T
Li, MF
Cho, BJ
Choi, WK
Yakovlev, N
JOURNAL OF APPLIED PHYSICS, 2003, 94 (01) : 551 - 557
[42] UNIQUE ELECTRICAL CHARACTERIZATION AND IN-LINE MONITORING OF NANO-TIPPED DEFECTS IN METAL-INSULATOR-METAL CAPACITORS
Sheng, Lieyi
Snyder, Eric
Doub, Jason
Berti, Valerie
Kriner, Levi
Glines, Eddie
2009 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, VOLS 1 AND 2, 2009, : 808 - 809
[43] DC to Radio-Frequency Characterization of ZrO2 Dielectric for "Metal-Insulator-Metal" Integrated Capacitors
Bertaud, T.
Vallee, C.
Bermond, C.
Lacrevaz, T.
Flechet, B.
Farcy, A.
Blonkovski, S.
APMC: 2009 ASIA PACIFIC MICROWAVE CONFERENCE, VOLS 1-5, 2009, : 1397 - +
[44] Proteorhodopsin characterization based on metal-insulator-metal structure technique
Melikyan, Harutyun
Khishigbadrakh, Balt-Erdene
Babajanyan, Arsen
Lee, Kiejin
Choi, Ah-Reum
Lee, Jung-Ha
Jung, Kwang-Hwan
Friedman, Barry
THIN SOLID FILMS, 2011, 519 (10) : 3425 - 3429
[45] THEORETICAL EVALUATION OF EXPERIMENTAL CHARACTERIZATION OF METAL-INSULATOR-METAL STRUCTURES
LEIPOLD, WC
FEUCHTWANG, TE
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1975, 20 (04): : 556 - 556
[46] THEORETICAL EVALUATION OF EXPERIMENTAL CHARACTERIZATION OF METAL-INSULATOR-METAL STRUCTURES
LEIPOLD, WC
FEUCHTWANG, TE
SURFACE SCIENCE, 1975, 50 (01) : 1 - 28
[47] Multimode metal-insulator-metal waveguides: Analysis and experimental characterization
Lin, Chien-I
Gaylord, Thomas K.
PHYSICAL REVIEW B, 2012, 85 (08)
[48] High-Performance Metal-Insulator-Metal Capacitors Using Europium Oxide as Dielectric
Padmanabhan, Revathy
Bhat, Navakanta
Mohan, S.
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2012, 59 (05) : 1364 - 1370
[49] A new damascene architecture for high-performance metal-insulator-metal capacitors integration
Farcy, A
Torres, J
Arnal, V
Fayolle, M
Feldis, H
Jourdan, F
Assous, M
Di Maria, JL
Vidal, V
MICROELECTRONIC ENGINEERING, 2003, 70 (2-4) : 368 - 372
[50] Structure Dependence of Resonant Tunneling Diode Oscillator without Metal-Insulator-Metal Capacitors
Mai, Ta Van
Suzuki, Yusei
Kozaka, Keiji
Yu, Xiongbin
Suzuki, Safumi
Asada, Masahiro
2021 46TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES (IRMMW-THZ), 2021,

← 1 2 3 4 5 →