Coarse-grain simulation of viscous flow and stamp deformation in nanoimprint

被引：7

作者：

Sirotkin, V. ^{[1
]}

Svintsov, A. ^{[1
]}

Zaitsev, S. ^{[1
]}

Schift, H. ^{[2
]}

机构：

[1] Russian Acad Sci, Inst Microelect Technol, Moscow 142432, Russia

[2] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2007年 / 25卷 / 06期

关键词：

Viscous flow;

D O I：

10.1116/1.2812534

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A refined coarse-grain software for the simulation of thermal nanoimprint lithography is described. This software takes into account the stamp bending during squeeze flow and is able to provide results well suited for the quantitative prediction of the residual resist thickness with an accuracy better than 10%. (c) 2007 American Vacuum Society.

引用

页码：2379 / 2383

页数：5

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