Separation of scattered ions and neutrals in medium-energy ion scattering spectroscopy

被引：5
|
作者：
Kobayashi, T
Dorenbos, G
Shimoda, S
Iwaki, M
Aono, M
机构：
[1] Inst. Phys. and Chem. Res. (RIKEN), Wako
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1996年 / 118卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(95)01484-5
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
For the purpose of surface and buried interface structural analysis, we have developed a medium-energy (similar to 100 keV) ion scattering (MEIS) spectrometer with a time-of-flight (TOF) energy analyzer that can detect scattered ions and neutrals separately at a scattering angle of 180 degrees. One of the reasons to use the TOF analyzer rather than an electrostatic one is to avoid the ambiguity in the ion neutralization probability. Indeed, we have found that the neutralization probability of 100 keV He+ ions backscattered from a Si(001) sample exhibits remarkable angular variations.
引用
收藏
页码：584 / 587
页数：4
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